Tufts Micro/Nano Fab

— PhD students Minchul Shin and Zhengxin Zhao working in the Tufts Micro/Nano Fab c. 2011.

This is a Class 1000 cleanroom and Core Facility for the University started by our group and run as a user facility with help from Dr. Jim Vlahakis and the School of Engineering. The lab has thin film deposition, photolithography, etching, packaging and metrology for MEMS and NEMS. See the TMNF website for more details.

Vibrations and Acoustics Lab / Sensors and Systems Lab

— Undergraduate Freidlay Steve looking through a microscope at a silicon device wafer in the sensors and systems lab, 2021.

Measurement of sound and vibration. The lab has a good selection of accelerometers and microphones, an electrodynamic shaker, impact hammer, speakers, and data acquisition abilities.

The lab has a small anechoic chamber for acoustic measurements, a benchtop reverberation chamber, a velocity sled for Doppler measurement, and a conductive ink writing system.

We also have a nice microscale Laser Doppler Velocimetry system (LDV) for vibration measurements with sub-angstrom resolution at frequencies from 10 Hz-20 MHz and spot size of less than 20 microns. The system is capable of single point transient scans, two dimensional spatially distributed steady state vibration scans, and two dimensional spatially distributed transient scans.

The lab is also equipped with microscopes, micropositioners and probes, and a variety of electrical test equipment. We can conduct basic mechanical and electrical fabrication (test fixturing and PC boards).